Structural and optical properties of AlInN and AlGaInN on GaN grown by metalorganic vapor phase epitaxy.pdf

Structural and optical properties of AlInN and AlGaInN on GaN grown by metalorganic vapor phase epitaxy.pdf

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文集编号: 2014101309885

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2014年诺贝尔物理学奖得主Hiroshi Amano和Isamu Akasaki论著。

摘要:We studied structural and optical properties of Al1~xInxN and Al1~y~zGazInyN Þlms. The Þlms were grown on GaN by atmospheric pressure metalorganic vapor-phase epitaxy. GaN was grown on a c-plane sapphire substrate with a low-temperature-deposited AlN bu¤er layer. Photoluminescence (PL), absorption and X-ray di¤raction measurements of Al1~xInxN showed that PL and absorption spectral peaks shift to lower photon energy with increasing alloy composition x and that Al0.83In0.17N has the highest crystallinity.

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